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STANDARD MODEL

OPUS3 SD

OPUS3 SD is the only prober in the market which handles 6" & 8" and 12 inch SEMI standard wafers, without having any change kit.
It is compact, with high accuracy for consistent contact/ probing and fast index time for higher throughput.
It is suitable for automation with top loader.

  • OPUS3 SD
Key features Overview
  • Compact size for space efficiency
  • Universal probe card changer
  • Reliable temperature control
  • Stiff and strong Z structure
  • Map shift prevention
  • Real-time recipe validation
  • Intelligent pin alignment algorithm
  • Smart probing route algorithm
  • Flat loader for smallest foot print
  • Compatible with all type of tester
Specification Overview
Name OPUS3 SD
Wafer Size *6 & 8 & 12 inch
Dimension 1530(W) x 1782(D) x 960(H)
X, Y Probing Area X : ±180mm
Y : ±175mm
Needle Force 450kgf
XY Accuracy X : +1.0㎛
Y : ±1.0㎛
Tri-Temp COLD: -40℃ / -55℃
HOT: 150℃ / 200℃
AMBIENT CONTROL (25℃)
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