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STANDARD MODEL

OPUS3 SH

OPUS3 SH is the only prober in the market which handles 6”, 8” and 12” SEMI Standard wafers, without having any change kit.
It is compact, with high accuracy for consistent contact/probing and fast index time for higher throughput.

  • OPUS3 SH
Key features Overview
  • Compact size for space efficiency
  • Fast probe card load & unload by drawer type card changer
  • Reliable temperature control
  • Stiff and strong z structure
  • Map shift prevention
  • Real-time recipe validation
  • Intelligent pin alignment algorithm
  • Smart probing route algorithm
  • Compatible with all pogo type of tester
  • Flat / Top loader & Automation Avilable.
Specification Overview
Name OPUS3 SH
Wafer Size *6 & 8 & 12 inch
Dimension 1490(W) x 1680(D) x 960(H)
X, Y Probing Area X : ±175mm
Y : ±175mm
Needle Force 450kgf
XY Accuracy X : +1.0㎛
Y : ±1.0㎛
Tri-Temp COLD: -40℃ / -55℃
HOT: 150℃ / 200℃
AMBIENT CONTROL (25℃)
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