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STANDARD MODEL

OPUS3 SLT

OPUS3 SLT is the only prober in the market which handles 6",8" and 12" SEMI Standard wafer, without having any change kit.
It is compact, with high accuracy for consistent contact/ probing and fast index time for higher throughput.
It is possible to load universal probe card.

  • OPUS3 SLT
Key features Overview
  • Compact size for space efficiency
  • Universal probe card changer
  • Reliable temperature control
  • Stiff and strong Z structure
  • Map shift prevention
  • Real-time recipe validation
  • Intelligent pin alignment algorithm
  • Smart probing route algorithm
  • Flat loader for smallest foot print
  • Compatible with all type of tester
Specification Overview
Name OPUS3 SLT
Wafer Size 8 & 12 inch (6”option)
Dimension 1485(W) x 1720(D) x 960(H)
X, Y Probing Area X : ±175mm
Y : -175mm, +200mm
Needle Force 230kgf
XY Accuracy X : ±1.5㎛
Y : ±1.5㎛
Tri-Temp COLD -40℃ / -55℃
HOT 150℃ / 200℃
AMBIENT CONTROL 25℃
Product list
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