SEMICS 문화는 결과에 상관없이 모든 도전을 응원합니다.
Opus Mini & Genie which are the smallest wafer prober in the world are now ready to provide leading-edge technologies with auto tilting & active force measurement chuck and flexible loader change based on wafer size. From now on, this high end performance wafer probing system will change the world and will bring you a lot of differentiation and also will bring great value.
· The smallest wafer prober
· The most rigid and strongest probing stage
· The best contact profiling by chuck tilting and force measurement according to probe card planarity
· Active stiffness compensation by force measurement
· All on board for extremely easy maintenance
· Windows 10based user interface and modular based feature
· SONET server for advanced data management
| Name | OPUS MINI |
|---|---|
| Wafer Size | 8 & 12 inch(6”option) |
| Dimension | 1234(W) x 1100(D) x 960(H) |
| X, Y Probing Area | X : ±120mm Y : ±120mm |
| Needle Force | 500KG |
| XY Accuracy | X : ±1㎛ Y : ±1㎛ |
| Tri-Temp | Ambient to 150℃ (200℃) -55℃ ~ 200℃ Ambient 25℃ |
| Name | Genie |
|---|---|
| Wafer Size | 6” & 8 & 12 inch |
| Dimension | 1475(W) x 1100(D) x 960(H) |
| X, Y Probing Area | X : ±170mm Y : ±170mm |
| Needle Force | 500KG |
| XY Accuracy | X : ±1㎛ Y : ±1㎛ |
| Tri-Temp | Ambient to 150℃ (200℃) -55℃ ~ 200℃ Ambient 25℃ |
경기도 광주시 곤지암읍 경충대로 732-37
TEL 031-697-6600 Fax : 031-798-3234
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