SEMICS 문화는 결과에 상관없이 모든 도전을 응원합니다.
Opus-SH is the only prober in the market which handles 6 & 8 and 12inch SEMI Standard wafer, without having any change kit. It is compact, with high accuracy for consistent contact/probing and fast index time for higher throughput.
· Compact size for space efficiency
· Universal probe card changer
· Reliable temperature control
· Stiff and strong Z structure
· Map shift prevention
· Real-time recipe validation
· Intelligent pin alignment algorithm
· Smart probing route algori
| Name | OPUS SH |
|---|---|
| Wafer Size | 8 & 12 inch(6”option) |
| Dimension | 1485(W) x 1720(D) x 960(H) |
| X, Y Probing Area | X : ±175mm Y : ±165mm |
| Needle Force | 300Kg |
| XY Accuracy | X : ±1㎛ Y : ±1㎛ |
| Tri-Temp | Ambient to 150℃ (200℃) -55℃ ~ 200℃ Ambient 25℃ |
경기도 광주시 곤지암읍 경충대로 732-37
TEL 031-697-6600 Fax : 031-798-3234
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