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OPUS SS

Opus-SS is specialized in 6 & 8 inch wafer handling and it is optimized to compact foot print. It is compact, with high accuracy for consistent contact/probing and fast index time for higher throughput.

Key features Overview

· Specialized in 6 & 8 inch wafer
· Space efficient foot print
· Reliable temperature control
· Stiff and strong Z structure
· Map shift prevention
· Real-time recipe validation
· Intelligent pin alignment algorithm
· Smart probing route algorithm

Specification Overview

Name
OPUS SS
Wafer Size
8 inch
X, Y Probing Area
X : ±115mm
Y : ±115mm
Max Probing Force
500KG
XY Accuracy
X : ±1.5㎛
Y : ±1.5㎛
Tri-Temp
Ambient to 150℃ (200℃)
-55℃ ~ 200℃
Ambient 25℃

경기도 광주시 곤지암읍 경충대로 732-37
TEL 031-697-6600 Fax : 031-798-3234
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