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OPUS3

Opus3 is the only prober in the market which handles 6",8" and 12" SEMI Standard wafer, without having any change kit. It is compact, with high accuracy for consistent contact/ probing and fast index time for higher throughput. It is possible to load universal probe card.

Kea features Overview

· Compact size for space efficiency
· Universal probe card changer
· Reliable temperature control
· Stiff and strong Z structure
· Map shift prevention
· Real-time recipe validation
· Intelligent pin alignment algorithm
· Smart probing route algorithm
· Flat loader for smartest foot print
· Compatible with all type of tester

Specification Overview

Name Opus3
Wafer Size 8 & 12 inch(6”option)
X,Y Probing Area X : ±175mm
Y : ±165mm
Needle Force 300Kg
XY Accuracy X : ±1㎛
Y : ±1㎛
Tri-Temp Ambient to 150℃ (200℃)
-55℃ ~ 200℃
Ambient 25℃

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