SEMICS 문화는 결과에 상관없이 모든 도전을 응원합니다.
Opus-SD is the only prober in the market which handles 6 & 8 and 12 inch SEMI standard wafers, without having any change kit. It is compact, with high accuracy for consistent contact/ probing and fast index time for higher throughput. It is suitable for automation with top loader.
· Compact size for space efficiency
· Universal probe card changer
· Reliable temperature control
· Stiff and strong Z structure
· Map shift prevention
· Real-time recipe validation
· Intelligent pin alignment algorithm
· Smart probing route algorithm
· Flat loader for smartest foot print
· Compatible with all type of tester
| Name | OPUS SD |
|---|---|
| Wafer Size | 6 & 8 & 12 inch |
| Dimension | 1528(W) x 1782(D) x 960(H) |
| X,Y Probing Area | X : ±175mm |
| X : ±175mm | |
| Needle Force | 300Kg |
| XY Accuracy | X : ±1.5㎛ |
| Y : ±1.5㎛ | |
| Tri-Temp | Ambient to 150℃ (200℃) |
| -55℃ ~ 200℃ | |
| Ambient 25℃ |
경기도 광주시 곤지암읍 경충대로 732-37
TEL 031-697-6600 Fax : 031-798-3234
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